Ebara A10S Specifications
Pumping Speed (N2) 50/60Hz 1000/1200 l/min
Pumping Speed (N2) 50/60Hz 60/72 m3/h (36/42 CFM)
Ultimate Vacuum 50/60Hz 5x10-2/4x10-2
Water Consumption 3.5 l/min
Nitrogen Consumption 10-12 SLM
Voltage 200-220/380-415 V
Inlet Flange Size DN 40KF
Exhaust Flange Size DN 40 KF
The A Series dry vacuum pump has a compact design and includes various sensors and controls to enhance reliability and operation.
The pump is a roots-type vacuum pump that rotates a pair of non-contact, multi-stage rotors synchronized by timing gears. High-capacity units have a Booster Pump (BP) connected in series with the Main Pump (MP).
A compartment, isolated from the pump casing, encloses the timing gears and bearings, which require lubrication with Perfluoro-Polyether (PFPE) oil and grease. The pumps of this series are factory-filled with lubricating oil. Replenish or replace only with the recommended oil grades shown in Specification Tables 3.1 and 3.2.
Pressurized nitrogen, supplied to the labyrinth seal section, isolates the vapor stream from the lubricated components, enabling the pump to draw a clean vacuum without admitting lubricant oil to the pump casing.
Additional N2 gas, injected in various pump stages, reduces corrosion due to process gas and retards the accumulation of reaction byproducts. For processes that do not produce corrosion or reaction byproducts, the selector valve can stop completely the dilution N2 flow. Adjusting the regulation pressure to the specified value supplies the correct amount of N2 gas for these two types of purge operation. The pumps of this series are equipped with a dilution N2 gas control valve. Consult EBARA
before adjusting the N2 gas supply to the appropriate level for specific conditions of use. (Maximum dilution N2 flow rate: 76 Pam3/s.)
Compressing gas from vacuum to atmospheric pressure generates heat. Therefore, cool motors and casings with cooling water. Quick-connect cooling water couplers make connection and disconnection easy.
The exhaust check valve, a standard accessory, prevents reverse flow of gas from the exhaust back through the pump to the vacuum chamber when pump stops. A silencer (optional) reduces exhaust noise.
A Series dry vacuum pumps have a built-in sensing unit consisting of an Earth Leakage Breaker (ELB), an electro-magnetic switch and a control circuit or an overcurrent circuit breaker (CB). To improve reliability and safety, sensors monitor the condition of each utility and pump section. During pump operation the central processing unit monitors all operating conditions, including power supply, cooling water flow, N2 gas flow, lubrication oil level, casing and motor coil temperature, motor current and suction pressure.